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Etching FOx-22 in PT-MTL

PROM Request Title: 
Etching FOx-22 in PT-MTL
PROM Request Summary: 
Request to etch FOx-22 spin on glass in PT-MTL etcher.
PROM Date: 
07/25/2014
PROM Decision: 
Approved. PT-Ox recommended due to CHF3 availability but material is approved for PT-MTL.