Dichlorosilane processing on Fiji1
PROM Request Title:
Dichlorosilane processing on Fiji1
PROM Request Summary:
Request to use DCS precursor on Fiji1.
PROM Date:
09/22/2014
PROM Decision:
Approved with modifications. Clarifications regarding DCS monitoring during processing added.
Link to PROM Request and supporting documentation:
Equipment List:
