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Crystal Bond 509 in Xactix (XeFe2) Etcher

PROM Request Title: 
Crystal Bond 509 in Xactix (XeFe2) Etcher
PROM Request Summary: 
Request to use Crystal Bond 509 in Xactix (XeFe2) Etcher. Crystal Bond 509 is approved for lab use but not standard for Xactix.
PROM Date: 
02/21/2014
PROM Decision: 
Approved for use with gold contaminated chuck.