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Ce(iPrCp)3 for CeO2 ALD

PROM Request Title: 
Ce(iPrCp)3 for CeO2 ALD
PROM Request Summary: 
Request to bring new precursor in for use in Fiji3
PROM Date: 
07/09/2020
PROM Decision: 
Approved.
Equipment List: 
Fiji 3 ALD (fiji3)