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Annealing of 1 cm2 GaAs Chip at 350 C in RTA

PROM Request Title: 
Annealing of 1 cm2 GaAs Chip at 350 C in RTA
PROM Request Summary: 
Calculations performed to quanitfy exposure risk to As gas.
PROM Date: 
10/12/2017
PROM Decision: 
Request approved.