ALD of WO3 in Fiji3
PROM Request Title:
ALD of WO3 in Fiji3
PROM Request Summary:
Proposal to allow WO3, which is a non-standard film on Fiji3 to take advantage of the boost capability.
PROM Date:
09/11/2018
PROM Decision:
Request approved with ICPMS contamination collection. Data review is appended.
Link to PROM Request and supporting documentation:
Equipment List:
