TiN Characterization
Project Type:
E241
Date:
June 2014
Areas of Interest:
Faster, better ALD TiN films
Report(s):
Processing Technique (former Function and Method):
Researchers and (Mentors):
Kye Okabe, Max Shulaker, (Michelle Rincon), (J Provine)
List of Important Equipment:
Presentation(s):
