Surface Micromachining Method for Releasing a Range of Micron-Scale Membranes
Project Type:
E241
Date:
December 2014
Areas of Interest:
MEMS, release strategies
Report(s):
Processing Technique (former Function and Method):
Researchers and (Mentors):
Martin Winterkorn, Anup Dadlani, Yongmin Kim, (J Provine), (Michelle Rincon)
