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Surface Micromachining Method for Releasing a Range of Micron-Scale Membranes
Project Type:
E241
Date:
December 2014
Areas of Interest:
MEMS, release strategies
Function and Method:
Researchers and (Mentors):
Martin Winterkorn, Anup Dadlani, Yongmin Kim, (J Provine), (Michelle Rincon)
Presentation(s):
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