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Profile of Deposition Techniques at SNF
Project Type:
nano@stanford Fellowship
Date:
March 2020
Areas of Interest:
Deposition
Processing Technique (former Function and Method):
Deposition
Researchers and (Mentors):
Samuel Mumford (Maurice Stevens)
List of Important Equipment:
AJA Evaporator (aja-evap)
Innotec Evaporator (Innotec)
Intlvac Evaporation (Intlvac_evap)
Lesker Sputter (lesker-sputter)
PlasmaTherm Versaline HDP CVD System (hdpcvd)
PlasmaTherm Shuttlelock PECVD System (ccp-dep)
Savannah ALD (savannah)
MVD (mvd)
Fiji 1 ALD (fiji1)
Fiji 2 ALD (fiji2)
Fiji 3 ALD (fiji3)
Tylan9 Forming Gas Anneal Furnace (tylan9)
Thermco LTO Deposition Furnace (thermcoLTO)
Thermco Nitride Deposition Furnace LPCVD (thermconitride1)
ThermcoPoly1 (thermcopoly1)
ThermcoPoly2 (thermcopoly2)
Teos SiO2 Deposition Furnace (teos2)
TylanBPSG (tylanbpsg)
Notes:
Source:
Profile of Deposition Techniques at SNF
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