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Profile of Deposition Techniques at SNF

Project Type:

nano@stanford Fellowship

Date:

March 2020

Areas of Interest:

Deposition

Function and Method:

Researchers and (Mentors):

Samuel Mumford (Maurice Stevens)

List of Important Equipment:

AJA Evaporator (aja-evap)

Innotec Evaporator (Innotec)

Intlvac Evaporation (Intlvac_evap)

Lesker Sputter (lesker-sputter)

PlasmaTherm Versaline HDP CVD System (hdpcvd)

PlasmaTherm Shuttlelock PECVD System (ccp-dep)

Savannah (savannah)

Tylan9 (tylan9)

ThermcoLTO (thermcoLTO)

ThermcoNitride (thermconitride1)

ThermcoPoly1 (thermcopoly1)

ThermcoPoly2 (thermcopoly2)

TylanBPSG (tylanbpsg)

Notes:

Source:

Profile of Deposition Techniques at SNF

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