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Profile of Deposition Techniques at SNF

Project Type:

nano@stanford Fellowship

Date:

March 2020

Areas of Interest:

Deposition

Processing Technique (former Function and Method):

Researchers and (Mentors):

Samuel Mumford (Maurice Stevens)

List of Important Equipment:

AJA Evaporator (aja-evap)

Innotec Evaporator (Innotec)

Intlvac Evaporation (Intlvac_evap)

Lesker Sputter (lesker-sputter)

PlasmaTherm Versaline HDP CVD System (hdpcvd)

PlasmaTherm Shuttlelock PECVD System (ccp-dep)

Savannah ALD (savannah)

Fiji 1 ALD (fiji1)

Fiji 2 ALD (fiji2)

Fiji 3 ALD (fiji3)

Tylan9 Forming Gas Anneal Furnace (tylan9)

Thermco LTO Deposition Furnace (thermcoLTO)

Thermco Nitride Deposition Furnace LPCVD (thermconitride1)

ThermcoPoly1 (thermcopoly1)

ThermcoPoly2 (thermcopoly2)

Teos SiO2 Deposition Furnace (teos2)

TylanBPSG (tylanbpsg)

Notes:

Source:

Profile of Deposition Techniques at SNF

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