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Profile of Deposition Techniques at SNF
Project Type:
nano@stanford Fellowship
Date:
March 2020
Areas of Interest:
Deposition
Function and Method:
Deposition
Researchers and (Mentors):
Samuel Mumford (Maurice Stevens)
List of Important Equipment:
AJA Evaporator (aja-evap)
Innotec Evaporator (Innotec)
Intlvac Evaporation (Intlvac_evap)
Lesker Sputter (lesker-sputter)
PlasmaTherm Versaline HDP CVD System (hdpcvd)
PlasmaTherm Shuttlelock PECVD System (ccp-dep)
Savannah (savannah)
MVD (mvd)
Fiji 1 (fiji1)
Fiji 2 (fiji2)
Fiji 3 (fiji3)
Tylan9 (tylan9)
ThermcoLTO (thermcoLTO)
ThermcoNitride (thermconitride1)
ThermcoPoly1 (thermcopoly1)
ThermcoPoly2 (thermcopoly2)
Teos2 (teos2)
TylanBPSG (tylanbpsg)
Notes:
Source:
Profile of Deposition Techniques at SNF
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