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Physical and Electrical Characterization of RF-Sputtered ITO Films for Use as Solar Cell Electrodes as well as Interlayers in Low-Resistance MIS Contacts in Ge/Si Transistors

Project Type: 
E241
Date: 
December 2017
Areas of Interest: 
Sputtering ITO for solar cell electrodes
Report(s): 
Physical and Electrical Characterization of Sputtered ITO Films for Use as Solar Cell Electrodes as Well as Interlayers in Low- Resistance MIS Contacts in Ge/Si Transistors- Final Report
Processing Technique (former Function and Method): 
Sputtering
Researchers and (Mentors): 
Koosha Nazif, Haydee Pacheco, (Maurice Stevens)
List of Important Equipment: 
Lesker Sputter (lesker-sputter)
Presentation(s): 
Physical and Electrical Characterization of Sputtered ITO Films for Use as Solar Cell Electrodes as Well as Interlayers in Low- Resistance MIS Contacts in Ge/Si Transistors- Final Presentation