Skip to content Skip to navigation

PECVD SiNx Conformal Stressor Films

Project Type: 
E241
Date: 
December 2014
Areas of Interest: 
SiNx stress and conformity, added strain from backside and sidewall deposition
Processing Technique (former Function and Method): 
Researchers and (Mentors): 
Ching-Ying Lu, Matthew Morea, (Usha Raghuram), (Jim McVittie), (Prof Jim Harris)