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Optimizing the Electrical Stability of Platinum Films Deposited in Lesker - Sputter

Project Type: 
E241
Date: 
December 2016
Areas of Interest: 
Sputtering
Function and Method: 
Researchers and (Mentors): 
Kirsten Kaplan, Karen Kim, Martin Winterkorn, (J Provine), (Siva Baskharan)
List of Important Equipment: