Optimizing the Electrical Stability of Platinum Films Deposited in Lesker - Sputter

Project Type:

E241

Date:

December 2016

Areas of Interest:

Sputtering

Report(s):

Processing Technique (former Function and Method):

Researchers and (Mentors):

Kirsten Kaplan, Karen Kim, Martin Winterkorn, (J Provine), (Siva Baskharan)

List of Important Equipment:

Presentation(s):