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Non-destructive Micro to Nanoscale Metal Patterning for Probing Thermal Anisotropy

Project Type: 
E241
Date: 
March 2019
Areas of Interest: 
Stencil lithography
Function and Method: 
Researchers and (Mentors): 
Chris Perez, Heungdong Kwon, (Usha Raguram), (J Provine)
List of Important Equipment: 
Nano Nugget(s): 

A process flow is presented to create periodic metallic gratings on the order of 150 nm using a stencil lithography technique.