Skip to content Skip to navigation

Low Vapor Pressure Precursor Delivery: A Case Study in MLD of Polyimide

Project Type: 
E241
Date: 
June 2015
Areas of Interest: 
Process development for polyimide MLD, Savannah thermal management understanding
Function and Method: 
Researchers and (Mentors): 
Tim English, (J Provine), (Michelle Rincon)
List of Important Equipment: