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Low Stress Poly-Si Film Development

Project Type: 
Community Service
Date: 
September 2009
Function and Method: 
Low Pressure (LP) CVD
List of Important Equipment: 
ThermcoPoly1 (thermcopoly1)
ThermcoPoly2 (thermcopoly2)
Report(s): 
Proposal: Low Stress PolySi film development
Final report on Low Stress Poly-silicon trials