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Low Stress Poly-Si Film Development
Project Type:
Community Service
Date:
September 2009
Function and Method:
Low Pressure (LP) CVD
List of Important Equipment:
ThermcoPoly1 (thermcopoly1)
ThermcoPoly2 (thermcopoly2)
Report(s):
Proposal: Low Stress PolySi film development
Final report on Low Stress Poly-silicon trials
Materials
Poly Silicon (Si)
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