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Improve the performance of MOCVD grown GaN-on-Si HEMT structure

Project Type: 
Community Service
Date: 
September 2015
Report(s): 
Improve the performance of MOCVD grown GaN-on-Si HEMT structure
Function and Method: 
Deposited III-N
List of Important Equipment: 
Aix-ccs (aix-ccs)