Grayscale lithography for chiral nanophotonic structures
Areas of Interest:
Grayscale lithography process development
Researchers and (Mentors):
Jefferson Dixon, Michelle Solomon, (Swaroop Kommera)
List of Important Equipment:
When using grayscale lithography on the Heidelberg, there are a few quirks that may slow down your progress. This document provides some warnings and helpful tricks to overcome the common roadblocks.