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Dry Etching of InSb Using OX-35 Etcher

Project Type: 
E241
Date: 
June 2018
Areas of Interest: 
Process development of InSb etch
Function and Method: 
Researchers and (Mentors): 
Settasit Chaikasetsin, Matthew Gutwald, Kate Lee, (Usha Raghuram), (Jim McVittie)
List of Important Equipment: 
Nano Nugget(s): 

Troubleshooting tips for roughened surfaces after etch (also called grassing or line edge roughness).