Skip to content Skip to navigation

Development of Thin Film Release of GaN using AlN and AlGaN Buffer Layers for MEMS Applications

Project Type: 
E241
Date: 
June 2015
Areas of Interest: 
MEMS, MOCVD, GaN, AlN, AlGaN, development of wet etch chemistry for AlGaN
Function and Method: 
Researchers and (Mentors): 
Caitlin Chapin, Karen Dowling, (Xiaoxing Xu)
List of Important Equipment: