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Corrosive Resistant ALD Coatings

Project Type: 
E241
Date: 
June 2011
Areas of Interest: 
Corrosive resistant ALD films; Al2O3, HfO2 and ZrO2
Function and Method: 
Researchers and (Mentors): 
Joseph Doll, Alexandre Haemmerli, (J Provine)
List of Important Equipment: