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Characterizing ALD HfO2 roughness based on different deposition conditions
Project Type:
Community Service
Date:
September 2019
Function and Method:
Thermal ALD
List of Important Equipment:
Savannah (savannah)
Report(s):
Project Proposal: Characterizing ALD HfO2 roughness based on different deposition conditions
Final Report: Characterizing ALD HfO2 roughness based on different deposition conditions
Materials
Hafnia (HfO
2
)
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