Skip to content
Skip to navigation
SUNetID Login
SUNetID Login
Stanford Nanofabrication Facility
Stanford Nanofabrication Facility
Navigation menu
SNF Main Menu
SNF Home
About
Lab User Guide
Main menu
Home
Characterizing ALD HfO2 roughness based on different deposition conditions
Project Type:
Community Service
Date:
September 2019
Report(s):
Project Proposal: Characterizing ALD HfO2 roughness based on different deposition conditions
Final Report: Characterizing ALD HfO2 roughness based on different deposition conditions
Function and Method:
Thermal ALD
List of Important Equipment:
Savannah (savannah)
Materials
Hafnia (HfO
2
)
Printer-friendly version