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Characterization of Fiji ALD Film Quality and Conformality in High Aspect Ratio/Deep Etched Structures

Project Type: 
E241
Date: 
December 2011
Areas of Interest: 
Conformality of ALD films; Al2O3, TiN and Pt
Function and Method: 
Researchers and (Mentors): 
Insun Park, Jooyong Sim, Young Ik Sohn, (J Provine)