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Bulk Silicon Carbide etching in PT-MTL

Project Type: 
E241
Date: 
June 2014
Areas of Interest: 
SiC etching in PT-MTL
Function and Method: 
Dry Etching
Researchers and (Mentors): 
Karen Dowling and Ashwin Shankar
List of Important Equipment: 
Plasma Therm Versaline LL ICP Metal Etcher (PT-MTL)
Report(s): 
Bulk Silicon Carbide Etching in PT-MTL- Final Report