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Bulk Silicon Carbide etching in PT-MTL
Project Type:
E241
Date:
June 2014
Areas of Interest:
SiC etching in PT-MTL
Function and Method:
Dry Etching
Researchers and (Mentors):
Karen Dowling and Ashwin Shankar
List of Important Equipment:
Plasma Therm Versaline LL ICP Metal Etcher (PT-MTL)
Report(s):
Bulk Silicon Carbide Etching in PT-MTL- Final Report
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