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Atomic Layer Deposition of Zinc Oxide

Project Type: 
E241
Date: 
December 2014
Areas of Interest: 
ALD ZnO deposition
Function and Method: 
Atomic Layer Deposition (ALD)
Researchers and (Mentors): 
Pranav Ramesh, Jiheng Zhao, (J Provine), (Michelle Rincon)
List of Important Equipment: 
Savannah (savannah)
Presentation(s): 
Atomic Layer Deposition of Zinc Oxide- Final Presentation
Report(s): 
Atomic Layer Deposition of Zinc Oxide- Final Report