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ALD Precursor Delivery & Debugging: A Case Study in Polymer Development
Project Type:
E241
Date:
December 2014
Areas of Interest:
PMDA, ODA
Report(s):
ALD Precursor Delivery & Debugging: A Case Study in Polymer Development- Final Report
Function and Method:
Atomic Layer Deposition (ALD)
Researchers and (Mentors):
Felix Alfonso, Tim English, (Michelle Rincon), (J Provine)
List of Important Equipment:
MVD (mvd)
Savannah (savannah)
Presentation(s):
ALD Precursor Delivery & Debugging: A Case Study in Polymer Development- Final Presentation
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