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ALD Precursor Delivery & Debugging: A Case Study in Polymer Development

Project Type: 
E241
Date: 
December 2014
Areas of Interest: 
PMDA, ODA
Function and Method: 
Atomic Layer Deposition (ALD)
Researchers and (Mentors): 
Felix Alfonso, Tim English, (Michelle Rincon), (J Provine)
List of Important Equipment: 
MVD (mvd)
Savannah (savannah)
Presentation(s): 
ALD Precursor Delivery & Debugging: A Case Study in Polymer Development- Final Presentation
Report(s): 
ALD Precursor Delivery & Debugging: A Case Study in Polymer Development- Final Report