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Uli Thumser

Contact Information

Phone:

(650)725-3694

Office:

Paul G. Allen 143

Contact Uli Thumser by email

About

Lab Organization(s):

SNF

Role:

Process Engineer - Benches/Litho

Uli is the wet bench lady who keeps everyone safe while using wet chemicals.

Trainer for

110°C Oven (oven110)

90°C Oven (oven90)

Alphastep 500 Profilometer (alphastep)

Critical Point Dryer (cpd)

Karl Suss MA-6 Contact Aligner 1 (karlsuss)

Karl Suss MA-6 Contact Aligner 2 (karlsuss2)

Mask Scrubber (masksrub)

Prometrix Resistivity Mapping System (prometrix)

Sensofar S-neox (s-neox)

SPTS uetch vapor etch (uetch)

SVG Develop Track 1 (svgdev)

SVG Develop Track 2 (svgdev2)

SVG Resist Coat Track 1 (svgcoat)

SVG Resist Coat Track 2 (svgcoat2)

Tencor P2 Profilometer (p2)

Wet Bench Clean 1 (wbclean-1)

Wet Bench Clean 2 (wbclean-2)

Wet Bench Clean_res- hotphos (wbclean_res-hotphos)

Wet Bench Clean_res-hf (wbclean_res-hf)

Wet Bench Clean_res-piranha (wbclean_res-piranha)

Wet Bench CMOS Metal (wbclean3) (wbclean3)

Wet Bench Decontamination (wbdecon)

Wet Bench Flexcorr 1 (wbflexcorr-1)

Wet Bench Flexcorr 2 (wbflexcorr-2)

Wet Bench Flexcorr 3 (wbflexcorr-3)

Wet Bench Flexcorr 4 (wbflexcorr-4)

Wet Bench Flexible Solvents (wbflexsolv)

Wet Bench Flexible Solvents 1 (wbflexsolv-1)

Wet Bench Flexible Solvents 2 (wbflexsolv-2)

Wet Bench Resist Strip (wbresstrip-1)

Backup trainer for

Flexus 2320 Stress Tester (stresstest)

Gasonics Aura Asher (gasonics)

HMDS Vapor Prime Oven, YES (yes)

HMDS Vapor Prime Oven, YES2 (yes2)

Lithography Solvent Bench (lithosolv)

Matrix Plasma Resist Strip (matrix)

Nanospec 210XP (nanospec2)

Nanospec 3 (nanospec3)

Wet Bench Miscellaneous (wbmiscres)

White Oven (white-oven)

Xactix Xenon Difluoride Etcher (xactix)

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