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Uli Thumser

Contact Information

Phone:

(650)725-3694

Office:

Paul G. Allen 143

Contact Uli Thumser by email

About

Lab Organization(s):

SNF

Role:

Process Engineer - Benches/Litho

Uli is the wet bench lady who keeps everyone safe while using wet chemicals.

Trainer for

110°C Oven (oven110)

90°C Oven (oven90)

Alphastep 500 Profilometer (alphastep)

Critical Point Dryer (cpd)

Flexus 2320 Stress Tester (stresstest)

Gasonics Aura Asher (gasonics)

Karl Suss MA-6 Contact Aligner 1 (karlsuss)

Karl Suss MA-6 Contact Aligner 2 (karlsuss2)

Lithography Solvent Bench (lithosolv)

Mask Scrubber (masksrub)

Matrix Plasma Resist Strip (matrix)

Prometrix Resistivity Mapping System (prometrix)

Sensofar S-neox (s-neox)

SPTS uetch vapor etch (uetch)

SVG Develop Track 1 (svgdev)

SVG Develop Track 2 (svgdev2)

SVG Resist Coat Track 1 (svgcoat)

SVG Resist Coat Track 2 (svgcoat2)

Tencor P2 Profilometer (p2)

Wet Bench Clean 1 (wbclean-1)

Wet Bench Clean 2 (wbclean-2)

Wet Bench Clean_res- hotphos (wbclean_res-hotphos)

Wet Bench Clean_res-hf (wbclean_res-hf)

Wet Bench Clean_res-piranha (wbclean_res-piranha)

Wet Bench CMOS Metal (wbclean3) (wbclean3)

Wet Bench Decontamination (wbdecon)

Wet Bench Flexcorr 1 (wbflexcorr-1)

Wet Bench Flexcorr 2 (wbflexcorr-2)

Wet Bench Flexcorr 3 (wbflexcorr-3)

Wet Bench Flexcorr 4 (wbflexcorr-4)

Wet Bench Flexible Solvents (wbflexsolv)

Wet Bench Flexible Solvents 1 (wbflexsolv-1)

Wet Bench Flexible Solvents 2 (wbflexsolv-2)

White Oven (white-oven)

Xactix Xenon Difluoride Etcher (xactix)

Backup trainer for

HMDS Vapor Prime Oven, YES (yes)

HMDS Vapor Prime Oven, YES2 (yes2)

Nanospec 210XP (nanospec2)

Nanospec 3 (nanospec3)

Reflectance Spectrometer Filmetrics F40 (filmetrics)

Wet Bench Miscellaneous (wbmiscres)

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