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Function and Method(s):
Atomic Layer Deposition (ALD)
Equipment Used:
Savannah ALD (savannah)
Related Documentation
Project
Low temperature ALD-Grown Superconducting Tunnel Contacts
SOP for Thin, low temperature ALD of Al2O3 and HfO2 with seed layer
SOP for Thin, low temperature ALD of Al2O3 and HfO2 with seed layer
PDF File:
SOP for Thin, low temperature ALD of Al2O3 and HfO2 with seed layer
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Materials
Alumina (Al
2
O
3
)
Thursday, August 10, 2023
