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Function and Method(s):
Sputtering
Equipment Used:
Lesker Sputter (lesker-sputter)
Lesker Sputter (lesker-sputter)
Related Documentation
Project
ALD Process for Top-Gating 2D Materials
ALD Process for Top-Gating 2D Materials
Lesker2 Sputter TiN Initial Development
Lesker2 Sputter TiN Initial Development
PDF File:
lesker-2_tin_sop2.pdf
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Materials
Titanium NItride (TiN)
Thursday, August 10, 2023
