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Function and Method(s):
Atomic Layer Deposition (ALD)
Equipment Used:
Savannah ALD (savannah)
Fiji 1 ALD (fiji1)
Fiji 2 ALD (fiji2)
Fiji 3 ALD (fiji3)
Related Documentation
Project
Low temperature ALD-Grown Superconducting Tunnel Contacts
How to characterize thin ALD films
How to characterize thin ALD films
PDF File:
How to characterize thin ALD films
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Thursday, August 10, 2023
