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Equipment name & Badger IDsort descending Technique Cleanliness Material Thickness Range Minimum Resolution Exposure Wavelength Mask Size Max Exposure Area Objective Separation Process Temperature Range Substrate Size Substrate Type
Karl Suss MA-6 Contact Aligner 1
karlsuss
All
365 nm 4 inch, 5 inch, 7 inch 5 inch mask = 4 inch, 7 inch mask = 6 inch, 4 inch mask = 3 inch
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Karl Suss MA-6 Contact Aligner 2
karlsuss2
All
365 nm or 405 nm 4 inch, 5 inch, 7 inch 5 inch mask = 4 inch, 7 inch mask = 6 inch, 4 inch mask = 3 inch
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