Skip to content Skip to navigation

Flexible

The "Flexible" cleanliness group is part of the SNF/ExFab contamination policy. For more information please click here.

The following is a list of equipment that fall into the "Flexible" category.

Subscribe to
Equipment name & Badger ID Training Required & Chargessort descending Cleanliness Lab Organization Location Notes
ThermcoLTO
thermcoLTO
Thermco LTO Deposition Furnace Training Flexible
SNF
SNF Cleanroom Paul G Allen L107

limits on material vapor pressure

Innotec Evaporator
Innotec
Innotec Evaporator Training Flexible
SNF
SNF Cleanroom Paul G Allen L107

Precious metals limit is <200nm

EV Group Wafer Bonder
evbond
EV Group Wafer Bonder Training Flexible
SNF
SNF Cleanroom Paul G Allen L107
White Oven
white-oven
White Oven Training Flexible
SNF
SNF Cleanroom Paul G Allen L107

For LOL2000 bake or bakes which are not allowed in the other ovens and need higher temperatures, up to 200C, programmable.

Ebeam Process Wet Bench
wbebres
Ebeam Process Wet Bench Training Flexible
SNF
SNF Cleanroom Paul G Allen L107

Manual developing of Ebeam resist

AJA Evaporator
aja-evap
AJA Evaporation training Flexible
SNF
SNF Exfab Paul G Allen 155A Venice

For more than 300nm deposition, please contact Graham Ewing<grahamj.ewing@stanford.edu> in advance

Thermolyne
thermolyne
Thermolyne Muffle Furnace Training Flexible
SNF
SNF Exfab Paul G Allen 159 Capitola
Voltera
voltera
Voltera Training Flexible
SNF
SNF Exfab Paul G Allen 151 Ocean
PDS 2010 LABCOTER™ 2 Parylene Deposition System
parcoater
Parylene Coater Training Flexible
SNF
SNF Exfab Paul G Allen 155 Mavericks
CytoViva HSI
cytoviva
Cytoviva Training Flexible
SNF
SNF Exfab Paul G Allen 151 Ocean
PDMS Spin Coater
spincoat-g3p8
PDMS Spin Coater Training Flexible
SNF
SNF Exfab Paul G Allen 155 Mavericks
Thermoscientific Oven
thermoscientific-oven
Thermoscientific Oven Training Flexible
SNF
SNF Exfab Paul G Allen 155 Mavericks
PDMS Hotplate
hotplate-1
PDMS Hotplate Training Flexible
SNF
SNF Exfab Paul G Allen 155 Mavericks
Minitech-GX Micromill
micromill
Micromill Training Flexible
SNF
SNF Exfab Paul G Allen 155 Mavericks
Micro Mist Coater PDR-04
micromist-coater
Micromist Coater Training Flexible
SNF
SNF Exfab Paul G Allen 104 Stinson
Oriel Deep UV Exposure Lamp
oriel-duv
Oriel DUV Training Flexible
SNF
SNF Exfab Paul G Allen 155A Venice
Nanospec 3
nanospec3
Nanospec 3 Training Flexible
SNF
SNF Cleanroom Paul G Allen L107
Formlabs Form2 3D Printer
form2-3d-printer
Form2 3D Printer Training Flexible
SNF
SNF Exfab Paul G Allen 155 Mavericks
Headway 3 Manual Resist Spinner
headway3
Headway 3 Training Flexible
SNF
SNF Exfab Paul G Allen 104 Stinson
Xplore Micro Compounder
N/A
Micro Compounder training Flexible
SNF
SNF Exfab Paul G Allen 159 Capitola

Pages

Equipment name & Badger ID Technique Cleaning Required Cleanliness Primary Materials Etched Other Materials Etched Material Thickness Range Materials Lab Supplied Minimum Resolution Objective Separation Process Temperature Range Chemicals Gases Substrate Size Substrate Type Maximum Load
Savannah
savannah
Flexible
1 Å - 50 nm
24 °C - 250 °C
,
,
,
,
,
,
,
,
,
,
,
,
Sinton Lifetime Tester
sinton-lifetime-tester
Flexible
Solidscape Wax 3D Printer
3d-wax-printer
Flexible
STS Plasma Enhanced CVD
sts
Flexible
100 Å - 5 μm
350 ºC
Four 4 inch or one 6 inch or one 8 inch
Technics Asher
technics
Flexible
,
,
Four 4" wafers to pieces, one 6" or 8" wafer
Thermco4
thermco4
Flexible
25 Å - 2 μm
700 °C - 1100 °C
50
ThermcoLTO
thermcoLTO
Flexible
100 Å - 3 μm
300 °C - 450 °C
,
,
26
ThermcoPoly2
thermcopoly2
Pre-Diffusion Clean Flexible
100 Å - 3 μm
525 °C - 650 °C
44
Thermolyne
thermolyne
Flexible
25 °C - 1000 °C
25
Thermoscientific Oven
thermoscientific-oven
Flexible
Thinky AR-100 Mixer
thinky-mixer
Flexible
Tylan9
tylan9
Flexible
250 °C - 1100 °C
,
,
50
Voltera
voltera
Flexible
Wet Bench Flexcorr 1
wbflexcorr-1
Flexible
,
,
,
,
,
,
,
,
,
,
Wet Bench Flexcorr 2
wbflexcorr-2
Flexible
,
,
,
,
,
,
,
,
,
,
Wet Bench Flexcorr 3
wbflexcorr-3
Flexible
,
,
,
,
,
,
,
,
,
Wet Bench Flexcorr 4
wbflexcorr-4
Flexible
Wet Bench Flexible Solvents
wbflexsolv
Flexible
,
,
,
,
,
,
,
,
,
,
Wet Bench Flexible Solvents 1
wbflexsolv-1
Flexible
,
,
,
,
,
,
,
,
,
,
Wet Bench Flexible Solvents 2
wbflexsolv-2
Flexible
,
,
,
,
,
,
,
,
,
,

Pages