Equipment name & NEMO ID | Training Required & Charges | Cleanliness | Location | Notes |
---|---|---|---|---|
RTA AllWin 610 aw610_l |
AllWin 610 RTA Training | Clean | SNF Cleanroom Paul G Allen L107 | |
RTA AllWin 610 aw610_r |
AllWin 610 RTA Training | Flexible | SNF Cleanroom Paul G Allen L107 | |
Thermco3 Oxidation Furnace thermco 3 |
Thermco 3 Oxidation Furnaces Training | Clean | SNF Cleanroom Paul G Allen L107 |
Dry and wet oxidation. Use calculator to determine growth rate. N2 annealing available. |
Tylan9 Forming Gas Anneal Furnace tylan9 |
Forming Gas Anneal Furnace Training | Flexible | SNF Cleanroom Paul G Allen L107 |
Any material that won't vaporize is okay. N2 and Ar annealing available. |
Equipment name & NEMO ID | Technique | Cleaning Required | Cleanliness | Material Thickness Range | Materials Lab Supplied | Process Temperature Range | Gases | Substrate Size | Substrate Type | Maximum Load |
---|---|---|---|---|---|---|---|---|---|---|
RTA AllWin 610 aw610_l |
Pre-Diffusion Clean | Clean |
21 °C - 1150 °C
|
, , |
1 wafer | |||||
RTA AllWin 610 aw610_r |
Flexible |
21 °C - 1150 °C
|
, , |
|||||||
Thermco3 Oxidation Furnace thermco 3 |
Pre-Diffusion Clean | Clean |
25.00 Å -
2.00 μm
|
700 °C - 1100 °C
|
50 | |||||
Tylan9 Forming Gas Anneal Furnace tylan9 |
Flexible |
250 °C - 1100 °C
|
, , |
50 |