Cleanliness:
Clean
Semiclean
Lab Facility:
SNF Cleanroom
Training Charges:
2.00 hours
Primary Trainer:
Maurice Stevens
Primary Maintenance:
Jim Haydon
Steps to become a tool user
-
Become a member of SNF.
- Read the relevant operating procedures:
- Intlvac Evaporator Operating Instructions
- Shadowing: Contact a qualified user of the tool to arrange to ‘shadow’. It would be best to find someone who has used the system often. If you don’t know of anyone, you may check reservations or history to find a qualified user. You may also contact the Discussion Lists. We recommend that you be with the lab member for the full time while operating the tool and ask lots of questions during the shadowing. You may have to shadow a qualified user more than one time to be comfortable with the tool.
Print the SNF Training Shadowing Form on clean room paper. - Contact the primary trainer:.Maurice Stevens
Location:
SNF Cleanroom Paul G Allen L107
Badger Area:
SNF: Metallization
Badger ID:
Intlvac_evap
0.0
0.5
μm
Pieces
2 inch wafer
3 inch wafer
4 inch wafer
6 inch wafer
Maximum Load:
12 4 inch wafers, 2 6 inch wafers
Aluminum (Al)
Chromium (Cr)
Cobalt (Co)
Germanium (Ge)
Hafnium (Hf)
Moly (Mo)
Nickel (Ni)
Niobium (Nb)
Palladium (Pd)
Silicon (Si)
Tantalum (Ta)
Titanium (Ti)
Tungsten (W)
Vanadium (V)
Zirconium (Zr)
Silicon
Silicon Germanium
Quartz