Cleanliness:
Clean
Cleaning Required:
Pre-Diffusion Clean
Lab Facility:
SNF Cleanroom
Training Charges:
1.00 hours
Primary Trainer:
Maurice Stevens
Primary Maintenance:
Jim Haydon
Backup Maintenance:
Mike Dickey
Steps to become a tool user
-
Become a member of SNF.
- Read the relevant operating procedures:
- Allwin 610 Rapid Thermal Process Systems (aw610)
- Shadowing: Contact a qualified user of the tool to arrange to ‘shadow’. It would be best to find someone who has used the system often. If you don’t know of anyone, you may check reservations or history to find a qualified user. You may also contact the Discussion Lists. We recommend that you be with the lab member for the full time while operating the tool and ask lots of questions during the shadowing. You may have to shadow a qualified user more than one time to be comfortable with the tool.
Print the SNF Training Shadowing Form on clean room paper. - Contact the primary trainer:.This tool requires a 1-hour training session for qualification.Maurice Stevens
Location:
SNF Cleanroom Paul G Allen L107
Badger Area:
SNF: Annealing, Oxidation and Doping
Badger ID:
aw610_l
Pieces
2 inch wafer
3 inch wafer
4 inch wafer
6 inch wafer
(4% H2 in N2)
(NH3)
(Ar)
(N2)
(O2)
Maximum Load:
1 wafer
Silicon
Silicon Germanium
Quartz