Published on Stanford Nanofabrication Facility (https://snfexfab.stanford.edu)

Home > Tylanfga (tylanfga)
Cleanliness: 
Semiclean
Cleaning Required: 
Standard Metal Clean
Lab Facility: 
SNF Cleanroom
Training Charges: 
1.00 hours
Primary Trainer: 
Maurice Stevens
Primary Maintenance: 
Saeed Nejad

Steps to become a tool user

  1. Become a member of SNF.
  1. Read the relevant operating procedures:
    • Tylan9
  2. Shadowing: Contact a qualified user of the tool to arrange to ‘shadow’. It would be best to find someone who has used the system often. If you don’t know of anyone, you may check reservations or history to find a qualified user. You may also contact the Discussion Lists. We recommend that you be with the lab member for the full time while operating the tool and ask lots of questions during the shadowing. You may have to shadow a qualified user more than one time to be comfortable with the tool.
    Print the SNF Training Shadowing Form on clean room paper.
  3. Contact the primary trainer:
    Maurice Stevens
    .
Location: 
SNF Cleanroom Paul G Allen L107
Badger ID: 
tylanfga
100.0
Å
100.0
Å
Pieces
2 inch wafer
3 inch wafer
4 inch wafer
(10% H2 in N2)
(Ar)
(N2)
Maximum Load: 
50
Notes: 

For standard metals deposited in Lesker2, Intlvac Sputter or Intlvac Evaporation only. N2 and Ar annealing available. Please contact staff for more information.

The bottom furnace in TylanBank1 is the  TylanFGA Furnace.

SNF staff
Source URL (modified on 29 Jul 2020 - 12:29 am): https://snfexfab.stanford.edu/guide/equipment/tylanfga-tylanfga