Find the current project schedule and more information here.
Cleanliness:
Clean
Cleaning Required:
Pre-Diffusion Clean
Lab Facility:
SNF Cleanroom
Training Charges:
1.00 hours
Primary Trainer:
Neel Mehta
Primary Maintenance:
Saeed Nejad
Steps to become a tool user
Become a member of SNF.
Study the relevant operating procedures:
Thermco 3, 4
Shadowing is required. Contact a qualified lab member of the tool to arrange to ‘shadow’. It would be best to find someone who has used the system often. If you don’t know of anyone, you may check reservations or history to find a qualified user. We recommend that you be with the lab member for the full time while operating the tool and ask lots of questions during the shadowing. You may have to shadow a qualified user more than one time to be comfortable with the tool. Please follow the instructions on this form: Shadowing at SNF
Contact the primary trainer: Neel Mehta
Location:
SNF Cleanroom Paul G Allen L107
NEMO Area:
SNF: Annealing, Oxidation and Doping
NEMO ID:
thermco 3
25.0
Å
2.0
μm
Pieces
2 inch wafer
3 inch wafer
4 inch wafer
6 inch wafer
(H2)
(N2)
(O2)
Maximum Load:
50
Notes:
Dry and wet oxidation. Use calculator to determine growth rate. N2 annealing available.
Silicon Dioxide (SiO2)
The top furnace in Thermco bank2 is the Thermco3 Furnace.