EV Group Contact Aligner (evalign)

EV aligner was rotated 90 degrees and now shares a single operator station with the EVbonder.

Minimum Resolution:

1.50 μm

The EV Contact Aligner system is part of the Electronic Visions 620 aligner- 501 bonder system. This tool can perform mask-to-wafer alignment for exposure or wafer-to-wafer alignment for bonding. Our current configuration accommodates 100 or 150mm wafers for exposure with bonding substrates limited to 100mm (EV Bonder).

Cleanliness:

All

Lab Facility:

SNF Cleanroom

Training Charges:

1.50 hours

Primary Trainer:

Swaroop Kommera

Primary Maintenance:

Mario Vilanova

Backup Maintenance:

Gary Sosa

Steps to become a tool user

Become a member of SNF.

"All Litho" class is required before training on any of the lithography tools. Please send an email to all-litho-training@lists.stanford.edu to sign up for the All Litho class. Read more here: All Litho class.
Sign up for the relevant training scheduled in

SNF Training Calendar

.
Read the relevant operating procedures:
EV Group Contact Aligner
Shadowing: Contact a qualified user of the tool to arrange to ‘shadow’. It would be best to find someone who has used the system often. If you don’t know of anyone, you may check reservations or history to find a qualified user. You may also contact the Discussion Lists. We recommend that you be with the lab member for the full time while operating the tool and ask lots of questions during the shadowing. You may have to shadow a qualified user more than one time to be comfortable with the tool.
Print the SNF Training Shadowing Form on clean room paper.
Contact the primary trainer:

Swaroop Kommera

.

Location:

SNF Cleanroom Paul G Allen L107

Badger Area:

SNF: Photolithography

Badger ID:

evalign

Exposure Wavelength:

350 - 450 nm

Mask Size:

5 inch

7 inch

Max Exposure Area:

5 inch mask = 4 inch, 7 inch mask = 6 inch

Pieces

2 inch wafer

3 inch wafer

4 inch wafer

6 inch wafer

Maximum Load:

one piece or wafer

Notes:

1:1 Contact Aligner.
Anodic Bond, backside align, including IR.

Silicon

Silicon Germanium

Quartz

Sapphire

Glass