Published on Stanford Nanofabrication Facility (https://snfexfab.stanford.edu)

Home > Blue M Oven (bluem)

The BlueM oven is for 200°C to 437°C temperature bakes, i.e. polyimide.

Cleanliness: 
Flexible
Lab Facility: 
SNF Cleanroom
Training Charges: 
0.50 hours
Primary Trainer: 
Cliff Knollenberg
Backup Trainer(s): 
Swaroop Kommera
Primary Maintenance: 
Mario Vilanova
Backup Maintenance: 
Gary Sosa

Steps to become a tool user

  1. Become a member of SNF.
  1. "All Litho" class is required before training on any of the lithography tools. Please send an email to all-litho-training@lists.stanford.edu to sign up for the All Litho class. Read more here: All Litho class.
  2. Read the relevant operating procedures:
    • Blue M Oven
  3. Shadowing: Contact a qualified user of the tool to arrange to ‘shadow’. It would be best to find someone who has used the system often. If you don’t know of anyone, you may check reservations or history to find a qualified user. You may also contact the Discussion Lists. We recommend that you be with the lab member for the full time while operating the tool and ask lots of questions during the shadowing. You may have to shadow a qualified user more than one time to be comfortable with the tool.
    Print the SNF Training Shadowing Form on clean room paper.
  4. Contact the primary trainer:
    Cliff Knollenberg
    .
Location: 
SNF Cleanroom Paul G Allen L107
Badger Area: 
SNF: Photolithography
Badger ID: 
bluem
Pieces
2 inch wafer
3 inch wafer
4 inch wafer
6 inch wafer
Notes: 

Convection in N2. Cure. Programmable.

Silicon
Silicon Germanium
Quartz
Sapphire
Glass
Germanium
Gallium Nitride
III-V
Gallium Arsenide
Polymer
Source URL (modified on 15 Mar 2021 - 3:07 pm): https://snfexfab.stanford.edu/guide/equipment/blue-m-oven-bluem