New program added: #05 Singe Bake 150C dehydration (vacuum) only, no HMDS. Replaces the oven bake 150C at the Singe oven which has been permanently removed from lab.
The YES prime oven dehydrates the wafers at 150ºC and primes the wafers using HMDS (Hexamethyldisilazane) allowing better coverage and adhesion between oxides and resists.
Two programs: Singe and HMDS prime or Singe only. No Resist allowed!
Links
[1] https://snfguide.stanford.edu/snf/substrate-size/pieces
[2] https://snfguide.stanford.edu/guide/substrate-size/2-inch-wafer
[3] https://snfguide.stanford.edu/guide/substrate-size/3-inch-wafer
[4] https://snfguide.stanford.edu/guide/substrate-size/4-inch-wafer
[5] https://snfguide.stanford.edu/snf/substrate-size/6-inch-wafer
[6] https://snfguide.stanford.edu/guide/substrate-type/silicon
[7] https://snfguide.stanford.edu/guide/substrate-type/silicon-germanium
[8] https://snfguide.stanford.edu/guide/substrate-type/quartz
[9] https://snfguide.stanford.edu/guide/substrate-type/sapphire
[10] https://snfguide.stanford.edu/guide/substrate-type/glass
[11] https://snfguide.stanford.edu/guide/substrate-type/germanium
[12] https://snfguide.stanford.edu/guide/substrate-type/gallium-nitride
[13] https://snfguide.stanford.edu/guide/substrate-type/iii-v
[14] https://snfguide.stanford.edu/guide/substrate-type/gallium-arsenide
[15] https://snfguide.stanford.edu/guide/chemicals/primers/hmds