Published on Stanford Nanofabrication Facility (https://snfexfab.stanford.edu)

Home > Ebeam Process Wet Bench (wbebres)
Cleanliness: 
Flexible [1]
Lab Facility: 
SNF Cleanroom [2]
Primary Maintenance: 
Gary Sosa [3]
Backup Maintenance: 
Mario Vilanova [4]

Steps to become a tool user

  1. Become a member of SNF [5].
  1. "All Litho" class is required before training on any of the lithography tools. Please send an email to all-litho-training@lists.stanford.edu [6] to sign up for the All Litho class. Read more here: All Litho class [7].
  2. Contact the primary trainer:
    .
Location: 
SNF Cleanroom Paul G Allen L107 [8]
Badger Area: 
SNF: Photolithography [9]
Badger ID: 
wbebres
Pieces [10]
2 inch wafer [11]
3 inch wafer [12]
4 inch wafer [13]
Notes: 

Manual developing of Ebeam resist

Solvents [14]
Source URL (modified on 29 Jul 2020 - 12:31 am): https://snfexfab.stanford.edu/guide/equipment/ebeam-process-wet-bench-wbebres#comment-0

Links
[1] https://snfexfab.stanford.edu/snf/cleanliness/flexible
[2] https://snfexfab.stanford.edu/snf/lab-organiation-facility/snf/snf-cleanroom
[3] https://snfexfab.stanford.edu/snf/people/gary-sosa
[4] https://snfexfab.stanford.edu/snf/people/mario-vilanova
[5] https://snfexfab.stanford.edu/snf/join/how-to-join-snf
[6] mailto:all-litho-training@lists.stanford.edu
[7] https://snfexfab.stanford.edu/all-litho-class
[8] https://snfexfab.stanford.edu/snf/locations/snf-cleanroom-paul-g-allen-l107
[9] https://snfexfab.stanford.edu/snf/badger-area/snf-photolithography
[10] https://snfexfab.stanford.edu/snf/substrate-size/pieces
[11] https://snfexfab.stanford.edu/snf/substrate-size/2-inch-wafer
[12] https://snfexfab.stanford.edu/snf/substrate-size/3-inch-wafer
[13] https://snfexfab.stanford.edu/snf/substrate-size/4-inch-wafer
[14] https://snfexfab.stanford.edu/nano/chemicals/solvents