SVGcoat computers have been rearranged. SVGcoat1(front track) computer is now on the right side of track system.
The SVG (Silicon Valley Group) coater is an automated track system for dispensing photoresist on 4" silicon, glass, or quartz wafers. The system includes two stations: a prime oven which bakes the wafer and dispenses the adhesion promoter, HMDS; and a combination spinner, which dispenses photoresist, and pre-bake oven which cures the resist. HMDS is only available at track 2. The uniformity of spun photoresists are typically +/- 100 Å.
Automatic Resist spinning and bake