The lithosolv wet bench is used for handling solvents or other volatile organics such as photoresist. Processes performed here include mask and substrate cleaning and pouring resist into smaller containers for manual dispensing. Acids and bases (namely, developers) must never be handled here. Liquid waste is collected locally. A solid hazardous waste under the benchtop is used to collect cleanroom wipes, vinyl gloves, swabs, and other solid materials which may be contaminated with solvents and photoresist.
Cleanliness:
Flexible
Lab Facility:
SNF Cleanroom
Primary Trainer:
Cliff Knollenberg
Backup Trainer(s):
Uli Thumser
Primary Maintenance:
Mario Vilanova
Backup Maintenance:
Gary Sosa
Steps to become a tool user
-
Become a member of SNF.
- "All Litho" class is required before training on any of the lithography tools. Please send an email to all-litho-training@lists.stanford.edu to sign up for the All Litho class. Read more here: All Litho class.
- Sign up for the relevant training scheduled in.SNF Training Calendar
- Read the relevant operating procedures:
- Lithography Solvent Bench
- Shadowing: Contact a qualified user of the tool to arrange to ‘shadow’. It would be best to find someone who has used the system often. If you don’t know of anyone, you may check reservations or history to find a qualified user. You may also contact the Discussion Lists. We recommend that you be with the lab member for the full time while operating the tool and ask lots of questions during the shadowing. You may have to shadow a qualified user more than one time to be comfortable with the tool.
Print the SNF Training Shadowing Form on clean room paper. - Contact the primary trainer:.Cliff Knollenberg
Location:
SNF Cleanroom Paul G Allen L107
Badger Area:
SNF: Photolithography
Badger ID:
lithosolv
Pieces
2 inch wafer
3 inch wafer
4 inch wafer
6 inch wafer
Notes:
Manual solvent cleaning of substrates or masks. Teflon coated metal tweezers cleaning.
Silicon
Silicon Germanium
Quartz
Sapphire
Glass
Germanium
Gallium Nitride
III-V
Gallium Arsenide
Solvents