The Solvent Wet Bench is used for manual solvent cleaning of silicon wafers, tweezers, glassware, or any other inert objects such as equipment parts. The bench is equipped with a carboy to collect solvent waste , two ultrasonic baths, one hot plate for heating solvents in beakers, and a N2 gun for drying.
Cleanliness:
Flexible
Lab Facility:
SNF Cleanroom
Training Charges:
0.50 hours
Primary Trainer:
Uli Thumser
Backup Trainer(s):
Mary Tang
Primary Maintenance:
Jim Haydon
Backup Maintenance:
Gary Sosa
Mario Vilanova
Steps to become a tool user
-
Become a member of SNF.
- Read the relevant operating procedures:
- Wet Bench Flexible Solvents
- Shadowing: Contact a qualified user of the tool to arrange to ‘shadow’. It would be best to find someone who has used the system often. If you don’t know of anyone, you may check reservations or history to find a qualified user. You may also contact the Discussion Lists. We recommend that you be with the lab member for the full time while operating the tool and ask lots of questions during the shadowing. You may have to shadow a qualified user more than one time to be comfortable with the tool.
Print the SNF Training Shadowing Form on clean room paper. - Sign up for the relevant training scheduled in.SNF Training Calendar
- Contact the primary trainer:.Uli Thumser
Location:
SNF Cleanroom Paul G Allen L107
Badger Area:
SNF: Wet Benches
Badger ID:
wbflexsolv-1
Pieces
2 inch wafer
3 inch wafer
4 inch wafer
6 inch wafer
Notes:
Manual solvent cleaning, two ultrasonic baths.
Silicon
Silicon Germanium
Quartz
Sapphire
Glass
Germanium
Silicon Carbide
Gallium Nitride
III-V
Gallium Arsenide
Polymer
Solvents