Published on Stanford Nanofabrication Facility (https://snfexfab.stanford.edu)

Home > Wet Bench Germanium (wbgen2)
The Wet Bench Germanium is for acid or base processing of Clean Germanium wafers only  
Cleanliness: 
Clean (Ge) [1]
Lab Facility: 
SNF Cleanroom [2]
Primary Trainer: 
Mary Tang [3]
Primary Maintenance: 
Jim Haydon [4]
Backup Maintenance: 
Gary Sosa [5]

Steps to become a tool user

  1. Become a member of SNF [6].
  1. Read the relevant operating procedures:
  2. Shadowing: Contact a qualified user of the tool to arrange to ‘shadow’. It would be best to find someone who has used the system often. If you don’t know of anyone, you may check reservations or history to find a qualified user. You may also contact the Discussion Lists [8]. We recommend that you be with the lab member for the full time while operating the tool and ask lots of questions during the shadowing. You may have to shadow a qualified user more than one time to be comfortable with the tool.
    Print the SNF Training Shadowing Form [9] on clean room paper.
  3. Contact the primary trainer:
    Mary Tang [3]
    .
Notes: 

wbclean-1 and -2 required

Location: 
SNF Cleanroom Paul G Allen L107 [10]
Badger Area: 
SNF: Wet Benches [11]
Badger ID: 
wbgen2
4 inch wafer [12]
Maximum Load: 
25
Notes: 

Clean Germanium wafers only: Pre-Diffusion Clean

Germanium [13]
50:1 Hydrofluoric Acid [14]
Source URL (modified on 29 Jul 2020 - 12:28 am): https://snfexfab.stanford.edu/guide/equipment/wet-bench-germanium-wbgen2#comment-0

Links
[1] https://snfexfab.stanford.edu/snf/cleanliness/clean/clean-ge
[2] https://snfexfab.stanford.edu/snf/lab-organiation-facility/snf/snf-cleanroom
[3] https://snfexfab.stanford.edu/snf/people/mary-tang
[4] https://snfexfab.stanford.edu/snf/people/jim-haydon
[5] https://snfexfab.stanford.edu/snf/people/gary-sosa
[6] https://snfexfab.stanford.edu/snf/join/how-to-join-snf
[7] https://snfexfab.stanford.edu/docs/operating-instructions/wet-bench-germanium
[8] https://snfexfab.stanford.edu/snf/join/discussion-lists
[9] https://snfexfab.stanford.edu/guide/training/snf-training-shadowing-form
[10] https://snfexfab.stanford.edu/snf/locations/snf-cleanroom-paul-g-allen-l107
[11] https://snfexfab.stanford.edu/snf/badger-area/snf-wet-benches
[12] https://snfexfab.stanford.edu/snf/substrate-size/4-inch-wafer
[13] https://snfexfab.stanford.edu/guide/substrate-type/germanium
[14] https://snfexfab.stanford.edu/guide/chemicals/acids/501-hydrofluoric-acid