Procedure for use of diced wafers in Drytek2
PROM Request Title:
Procedure for use of diced wafers in Drytek2
PROM Date:
11/05/2018
PROM Decision:
Request approved.
Link to PROM Request and supporting documentation:
Non-Drupalized Equipment List:
SNSF Flipscribe
Equipment List:
Epilog Fusion M2 Laser Cutter (lasercutter)
PROM Request Summary:
Procedure to put diced wafers into Clean etcher