Epi2 is the the first chamber on the tool and is referred to as Chamber A in most Epi communications.
Cleanliness:
Clean
Cleaning Required:
Pre-Diffusion Clean
Lab Facility:
SNF Cleanroom
Training Charges:
4.00 hours
Primary Trainer:
Maurice Stevens
Primary Maintenance:
Carsen Kline
Steps to become a tool user
-
Become a member of SNF.
- Read the relevant operating procedures:
- Epi2
- Shadowing: Contact a qualified user of the tool to arrange to ‘shadow’. It would be best to find someone who has used the system often. If you don’t know of anyone, you may check reservations or history to find a qualified user. You may also contact the Discussion Lists. We recommend that you be with the lab member for the full time while operating the tool and ask lots of questions during the shadowing. You may have to shadow a qualified user more than one time to be comfortable with the tool.
Print the SNF Training Shadowing Form on clean room paper. - Contact the primary trainer:.Maurice Stevens
Location:
SNF Cleanroom Paul G Allen L107
Badger Area:
SNF: Chemical Vapor Deposition
Badger ID:
epi2
50.0
Å
3.0
μm
4 inch wafer
(AsH3)
(B3H6)
(GeH4)
(H2)
(N2)
(PH3)
(SiH4)
Maximum Load:
1
Notes:
N and P doping available- intrinsic to 5E19 Operating pressure range is 5-300Torr
Germanium (Ge)
Poly Silicon (Si)
Silicon (Si)
Silicon Germanium (SiGe)