Published on Stanford Nanofabrication Facility (https://snfexfab.stanford.edu)

Home > ASML PAS 5500/60 i-line Stepper Training

ASML PAS 5500/60 i-line Stepper Training

Training Charges: 
4.00 hours
Primary Trainer: 
Cliff Knollenberg [1]
Primary Maintenance: 
Gary Sosa [2]
Backup Maintenance: 
Mario Vilanova [3]
Lab Facility: 
SNF Cleanroom [4]
Notes: 

Job Writing: 2 hours and  Tool Training: 2 hours

Training Charge Notes: 
(a) "All Litho" Required [5]
Steps to become a tool user: 
  1. "All Litho" class is required before training on any of the lithography tools. Please send an email to all-litho-training@lists.stanford.edu [6] to sign up for the All Litho class. Read more here: All Litho class [7].
  2. Read the relevant operating procedures:
  3. Shadowing: Contact a qualified user of the tool to arrange to ‘shadow’. It would be best to find someone who has used the system often. If you don’t know of anyone, you may check reservations or history to find a qualified user. You may also contact the Discussion Lists [9]. We recommend that you be with the lab member for the full time while operating the tool and ask lots of questions during the shadowing. You may have to shadow a qualified user more than one time to be comfortable with the tool.
    Print the SNF Training Shadowing Form [10] on clean room paper.
  4. Contact the primary trainer:
    .
Source URL (modified on 10 Mar 2022 - 11:14 am): https://snfexfab.stanford.edu/guide/equipment/training/asml-pas-550060-i-line-stepper-training

Links
[1] https://snfexfab.stanford.edu/snf/people/cliff-knollenberg
[2] https://snfexfab.stanford.edu/snf/people/gary-sosa
[3] https://snfexfab.stanford.edu/snf/people/mario-vilanova
[4] https://snfexfab.stanford.edu/snf/lab-organiation-facility/snf/snf-cleanroom
[5] https://snfexfab.stanford.edu/snf/training-charge-notes/all-litho-required
[6] mailto:all-litho-training@lists.stanford.edu
[7] https://snfexfab.stanford.edu/all-litho-class
[8] https://snfexfab.stanford.edu/docs/operating-instructions/asml
[9] https://snfexfab.stanford.edu/snf/join/discussion-lists
[10] https://snfexfab.stanford.edu/guide/training/snf-training-shadowing-form