Resist Postbake Oven 110°C Training
Primary Trainer:
Backup Trainer(s):
Uli Thumser [2]
Primary Maintenance:
Mario Vilanova [3]
Backup Maintenance:
Gary Sosa [4]
Lab Facility:
SNF Cleanroom [5]
Training Charge Notes:
Steps to become a tool user:
- "All Litho" class is required before training on any of the lithography tools. Please send an email to all-litho-training@lists.stanford.edu [7] to sign up for the All Litho class. Read more here: All Litho class [8].
- Study the relevant operating procedures:
- Oven 110C [9]
- Shadowing is required. Contact a qualified lab member of the tool to arrange to ‘shadow’. It would be best to find someone who has used the system often. If you don’t know of anyone, you may check reservations or history to find a qualified user. We recommend that you be with the lab member for the full time while operating the tool and ask lots of questions during the shadowing. You may have to shadow a qualified user more than one time to be comfortable with the tool. Please follow the instructions on this form: Shadowing at SNF [10]
- Contact the primary trainer: Cliff Knollenberg [1]