Process for using the AJA Evaporator in a Semiclean Fashion
PROM Request Title:
Process for using the AJA Evaporator in a Semiclean Fashion
PROM Date:
08/20/2018
PROM Decision:
Request approved.
Link to PROM Request and supporting documentation:
Equipment List:
AJA Evaporator (aja-evap)
Lam Research TCP 9400 Poly Etcher (lampoly)
PROM Request Summary:
Procedure documentation of use of the flexible AJA cleanliness category in a semiclean manner.