Process flow to go from PT-DSE (contaminated) to epi2 (clean)
PROM Request Title:
Process flow to go from PT-DSE (contaminated) to epi2 (clean)
PROM Date:
01/21/2014
PROM Decision:
Rejected. Further follow up from requester required.
Link to PROM Request and supporting documentation:
Equipment List:
AMAT Centurion Epitaxial System (epi2)
PROM Request Summary:
Process flow change request to go from contaminated to clean equipment (in violation of contmaination policy).